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無塵烤箱

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高潔凈度烘箱;

Product Description: High cleanliness oven;

提供不同尺寸內腔,雙腔/四腔/六腔類型設備;

Provide different sizes of cavity, double cavity / four cavity / six cavity type equipment;

根據客戶工藝需求,可選帶HEPA配置,與無HEPA配置;

According to the process requirements of customers, it can be configured with or without HEPA;

支持SECS/GEM自動聯機需求;

Support SECS/GEM automatic online requirements;

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無塵等級:Class 100;

Parameters: Dust free grade: Class 100;

含氧量: 選配;

Oxygen content: optional;

溫度范圍: +60~ +300°C;

Temperature range:+ 60 ° C ~ + 300 ° C;

溫度均勻度:±1.5% (空載) ;

Temperature uniformity: ± 1.5% (no load);

升溫速度:常溫~+300°C,升溫速率 > 6°C/min;

Heating rate: room temperature ~ + 300 ° C, heating rate > 6 ° C / min;

降溫速度:夾層降溫裝置,降溫斜率可設定;

Cooling rate: sandwich cooling device, cooling slope can be set;

溫度過沖:<2℃@200℃;

Temperature overshoot: < 2 ℃ @ 200 ℃;

溫控精度:±1°C (空載);

Temperature control accuracy: ± 1 ° C (no load);

烘箱擱板為活動式,共兩片, 擱板承重≥20kg;

The drying oven shelf is movable, with two pieces in total, and the shelf load is more than or equal to 20kg;

加熱功率: 6KW (單腔);

Heating power: 6kW (single chamber);

地址:上海市浦東新區張楊路2389弄3號樓普洛斯大廈768室      電話:+86 13761002245      郵箱: xiwang@amsemi.com

版權所有?上海矽旺電子科技有限公司   滬ICP備17000872號-1   網站制作:新網

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